基于有限元仿真的PIB-ST石英SAW传感器对氯化物的灵敏度研究
Study on Sensitivity of PIB-ST Quartz SAW Sensor to Chloride Based on Finite Element Simulation

DOI: 10.12677/JSTA.2021.93019, PP. 153-172

Keywords: 声表面波，氯化物，传感器，灵敏度
SAW, Chloride, Sensors, Sensitivity

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Abstract:

如今，有机气体可以说是无处不在。许多有机气体对人体和环境均有非常大的害处，因此研究一种新型有机气体传感器显得相当有必要。首先针对声表面波有机气体传感器的研究意义和历史发展进行分析，然后选择COMSOL软件构建了一种声表面波有机气体传感器的二维模型，以进行有限元仿真。模型主要由ST-切型石英基底、PIB敏感薄膜和铝电极构成。在模型构建完成之后，选择了六种有机气体对声表面波有机气体传感器模型进行了仿真。仿真过程中所改变的主要性能参数分别是铝电极的厚度、气体的具体参数、声表面波有机气体传感器的敏感薄膜厚度和有机气体的浓度。对铝电极和敏感膜厚度的仿真可以达到优化传感器机电耦合系数的目的。通过仿真，发现声表面波敏感膜的厚度是重要的性能参数，而有机气体的参数也将影响仿真的结果。同时，实验表明声表面波有机气体传感器的灵敏度和精准度相当高，具有很高的实用价值。
Nowadays, organic gases are everywhere. But a lot of organic gases are harmful to human body and environment, so it is necessary to study a new type of organic gas sensor. The research significance and historical development of saw organic gas sensor are analyzed, and then a two-dimensional model of saw organic gas sensor is constructed with COMSOL software for finite element simulation. The model is mainly composed of ST quartz substrate, PIB sensitive film and aluminum electrode. After the model construction, six kinds of organic gases are selected to test the model of saw organic gas sensor. The main performance parameters changed during the test are the thickness of aluminum electrode, the specific parameters of gas, the thickness of sensitive film of saw organic gas sensor and the concentration of organic gas. The measurement of the thickness of aluminum electrode and sensitive film can optimize the electromechanical coupling coefficient of the sensor. Through the test, it is found that the thickness of saw sensitive film is an important performance parameter, and the parameters of organic gas will also affect the test results. At the same time, the experiment shows that the sensitivity and accuracy of saw organic gas sensor are quite high, which have high practical value.

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