Hybrid Micro-Ring Resonator Hydrogen Sensor Based on Intensity Detection

DOI: 10.26650/electrica.2018.56722 In this paper, a photonic integrated device fabricated on a silicon-on-insulator (SOI) platform is studied numerically to investigate its hydrogen sensing potential based on intensity variations. A single-slot hybrid structure consisting of a coaxial micro-ring resonator (MRR) and a palladium (Pd) disk is utilized for this purpose. The results of the numerical study reveal a hydrogen sensing ability of 2.83×10-4/(v/v-% hydrogen) and limit of detection (LOD) of 9.93×10-3 which is more than 10 times of that of the hydrogen sensors based on the traditional resonance shift. The proposed hydrogen sensing technique presents a compatible SOI-based technology and also provides a reliable detection of the slightest changes from the zero concentration in an analytical procedure