Scalable High-Performance Ultraminiature Graphene Micro-Supercapacitors by a Hybrid Technique Combining Direct Writing and Controllable Microdroplet Transfer

Miniaturization of energy storage devices can significantly decrease the overall size of electronic systems. However, this miniaturization is limited by the reduction of electrode dimensions and the reproducible transfer of small electrolyte drops. This paper reports first a simple scalable direct writing method for the production of ultraminiature microsupercapacitor (MSC) electrodes, based on femtosecond laser reduced graphene oxide (fsrGO) interlaced pads. These pads, separated by 2 μm spacing, are 100 μm long and 8 μm wide. A second stage involves the accurate transfer of an electrolyte microdroplet on top of each individual electrode, which can avoid any interference of the electrolyte with other electronic components. Abundant in-plane mesopores in fsrGO induced by a fs laser together with ultrashort interelectrode spacing enables MSCs to exhibit a high specific capacitance (6.3 mF cm–2 and 105 F cm–3) and ～100% retention after 1000 cycles. An all graphene resistor–capacitor (RC) filter is also constructed by combining the MSC and a fsrGO resistor, which is confirmed to exhibit highly enhanced performance characteristics. This new hybrid technique combining fs laser direct writing and precise microdroplet transfer easily enables scalable production of ultraminiature MSCs, which is believed to be significant for practical application of micro-supercapacitor microelectronic systems