Frequency Modulation and Absorption Improvement of THz Micro-bolometer with Micro-bridge Structure by Spiral-Type Antennas

Design of spiral-type antenna-coupled micro-bridge structures. a Model of micro-bridge structure. b Spiral-type antenna on the support layer. c Spiral-type antenna with a single separate linear antenna on one of the bridge legs. d Spiral-type antenna with two separate linear antennas on the bridge legs. e Spiral-type antenna with two connected linear antennas on the bridge legs. f Directions of electric field and magnetic field for vertical incident ligh