高速扫描振镜动力学控制系统的建模与仿真
Modeling and Simulation of High-Speed Scanning Galvanometer Dynamic Control System

本高速扫描振镜是激光加工装备的核心器件，振镜在高速运行中其控制系统的控制性能受到线性与非线性等多种因素的影响，其影响因素较为复杂且具有多变性，因此高速扫描振镜控制性能的研究较少，致使激光加工精度与稳定性研究受到影响。本文针对扫描式激光振镜打标系统平台，首先基于电机平衡方程与Stribeck摩擦模型建立了带摩擦的振镜电机动力学数学模型，其次在电机模型基础上添加电流环、速度环、位置环三环PID控制并采用负反馈构建振镜控制系统Simulink仿真模型。应用仿真模型对打标圆进行仿真。通过仿真结果和实验结果对比显示，仿真圆度误差与实验结果在误差大小和变化规律上都有较高的重合性，可以说明此振镜控制仿真模型与实际振镜控制系统匹配度较好，其控制性能与实际振镜十分一致，一定程度上可代替实际振镜控制系统来进行研究，为高速扫描式振镜控制系统的控制性能研究提供了新的思路。
The high-speed scanning galvanometer is the core component of laser processing equipment. The control performance of the galvanometer during high-speed operation is affected by various factors such as linearity and non-linearity. The influencing factors are more complex and variability. The research on mirror control performance is difficult to carry out effectively, which affects the precision and stability of laser processing. This paper aims at the scanning laser galvanometer marking system platform. Firstly, a mathematical model of galvanometer motor with friction is established based on the motor balance equation and the Stribeck friction model. Secondly, the current model, speed loop and position loop are added to the motor model. The loop PID control and negative feedback were used to build the Simulink simulation model of the galvanometer control system. The simulation model is used to simulate the marking circle. The comparison between the simulation results and the experimental results shows that the simulated roundness error has a high coincidence with the experimental results in the size and variation of the error. This can indicate that the galvanometer control simulation model matches the actual galvanometer control system well. Its control performance is very consistent with the actual galvanometer, and it can replace the actual galvanometer control system for research to a certain extent, providing a new idea for the control performance research of high-speed scanning galvanometer control system.