面向压电泵脉动消除的流体滤波器设计与实验
Design and Experiment of a Microflow Stabilizer for Eliminating the Pulse Of Piezoelectric Micropump

设计了一种被动式流体滤波器，它由薄膜及微通道组成，旨在消除由压电泵引起的流体脉动。对流体滤波器进行了理论分析，利用Comsol软件建立滤波器的有限元模型，分别对薄膜变形以及微通道流阻进行数值计算，并分析了影响滤波效果的参数。仿真结果表明，当微通道内的流体阻力较大时，泵的驱动频率越高，薄膜半径越大，滤波效果更佳。通过实验验证，表明所设计的流体滤波器可以有效减小脉动，压电泵能够提供稳定的流量。
This paper presents a microflow stabilizer, which contains a fluid capacitor and a microchannel that can reduce the fluctuation of the pulsatile flow generated by a piezoelectric micropump. A parameter model was developed and the dynamic simulation was presented in order to study the dynamic device characteristics. Simulation showed that larger fluidic resistance of the microchannel, higher pump frequency, and larger capacitor radius contributed to better flow stabilization. Experiments were conducted to verify the effectiveness of the stabilizer, and the results showed that the designed microflow stabilizer could ensure stable flow in a piezoelectric pump.