阀参数对螺旋线形阀压电泵输出性能的影响
Influence of Valve Parameters on Output Performance of Spiral Linear Valve Piezoelectric Pump

为了提高拟悬臂梁结构的螺旋线形阀压电泵输出性能，探讨了阀的几何参数和阀的材料参数与泵输出量之间的优化关系。首先，推导了泵流量输出与阀几何参数关系式；然后，在该理论指导下，通过多组试验研究了阀的几何参数对泵输出的量的影响关系，得出选用适当的螺旋极角以及适当降低阀的臂宽和厚度可以提高压电泵的输出；最后，对关键元器件螺旋线形阀材料参数的选用进行了比较，得出选用较低切变模量的阀材料可以提高压电泵输出。试验结果表明：要获得较高的泵流量，阀的极角取值为1.5π、阀厚度取值为0.1 mm时最佳，而流量受臂宽的影响呈单边的趋势性不明显；相同条件下，由于铍青铜的材料切变模量小于弹簧钢的材料切变模量，铍青铜阀压电泵的输出流量高于弹簧钢阀压电泵的输出流量。
The piezoelectric pump with valve is becoming more and more favored in aerospace, micromechanics and biological medicine due to the advantages of non-magnetic drive, simple structure, small volume and light weight. In order to improve the output performance of Spiral Linear Valve Piezoelectric Pump in a proposed cantilever structure, the optimization relationship between the geometric parameters of the valve and the material parameters of the valve and the output of the pump is discussed. Firstly the geometric parameter relational expression between pump flow output and valve is deduced, and then under the theoretical guidance, the influence of geometric parameters on the pump output is explored through multi-group experiments. It can be found that the output of Piezoelectric Pump can be improved through selecting the proper spiral polar angle and reducing the width and thickness of valve arm. Comparing the selection of material parameters of Spiral Linear Valve, the output of pump maybe improved through selecting the valve materials with lower shear modulus. The experimental results show that, in order to get higher pump output flow, the best condition is that polar angle of valve takes 1.5π, the valve thickness takes 0.1mm，and the flow influenced by the width of crank arm is not obvious unilateral trend. In this case, the material shear modulus of beryllium bronze is smaller than that of spring steel, the output flow of beryllium bronze valve piezoelectric pump is higher than that of spring steel valve piezoelectric pump.