双足压电直线作动器结构优化与实验
Structure Optimization and Experiment of Double-Feet Piezoelectric Linear Actuator

为提高双足压电直线作动器的有效驱动，增强作动器中二级杠杆微位移结构和柔性铰链的放大能力，对作动器的结构参数进行优化。首先，对二级杠杆微位移机构的放大倍数进行理论计算，基于ANSYS完成作动器定子作动仿真过程；其次，通过仿真分析发现，在作动器定子中综合使用直圆型柔性铰链和直梁型柔性铰链，会使作动器定子放大倍数得到优化，最优铰链参数对应的放大倍数为8.131；最后，制作了该作动器样机并进行了定子驱动足振幅测试，两驱动足的振动相对稳定。实验结果表明，驱动足I,II的位移振幅在60和63 μm的上下范围浮动，与实际相符合。与现有的压电直线作动器相比较，该作动器结构简单，易于安装调试，具有大振幅驱动和运行稳定等特点。
In order to improve the effective drive of double-feet piezoelectric linear actuator and enhance magnifying ability of micro-displacement structure of secondary lever and flexure hinge in actuator, structural parameters of the actuator areoptimized. Firstly, the amplification of secondary lever micro- displacement mechanism is calculated theoretically, and the simulation process of the actuator stator is completed based on ANSYS. Secondly, through the simulation analysis, it is found that the comprehensive use of straight circular flexure hinge and straight beam flexure hinge in the actuator stator can optimize the magnification of the actuator stator, and the corresponding magnification of the optimal hinge parameter is 8.131. Thirdly, the prototype of the actuator is made and the amplitude of the stator driving foot is tested, and vibrations of two driving feet are relatively stable. The experimental results show that the displacement amplitude of driving foot I and II floats in the range of 60 and 63μm. Compared with the existing piezoelectric linear actuator, the actuator has advantages of simple structure, easy installation and debugging, and high stable operation.