双柔铰导向式非共振压电直线电机
Non-resonant Piezoelectric Linear Motor with Double Flexible Hinges Guide

光波导封装等领域对拥有大行程、高精度以及高分辨率的微位移平台有大量需求，在研究微位移平台的过程中设计了一种双铰链导向式非共振压电直线电机。简述了电机的工作原理，完成了电机的结构设计，制作出电机的样机并完成相关的实验，实验设备主要有信号发生器、功率放大器、示波器和激光位移传感器等。实验表明，电机最大速度达到10.36 mm/s，分辨率达到0.3μm，理论最大输出推力达到8.33N，电机设计达到预期目的。
Micro position platform with a long traveling stroke and a high resolution are greatly required in modern manufacturing industry such as optical waveguide packaging. A non-resonant piezoelectric linear motor is designed for a micro position platform. The principle of operation is briefly introduced, and a prototype is fabricated. The experimental equipments include a signal generator, a power amplifier, a digital phosphor oscilloscope and a laser displacement sensor. The experiment results show that the maximum speed of the motor can reach up to 10.36mm/s with 0.3μm resolution, and the theoretical maximum thrust force of the motor is as 8.33N, which satisfies the application requirements of the micro position platform.