智能微位移主动隔振模糊PID控制系统
Research for the Smart Micro-Displacement Active Vibration Isolation System-Based on Fuzzy-PID Control Algorithm

为了解决精密加工设备的微位移隔振问题，研制了一种以压电陶瓷为作动器的智能微位移主动隔振系统。在现有数据采集系统和激振器的基础上搭建了相应的实验平台，提出将模糊-比例积分微分（fuzzy-proportional integral derivative，简称Fuzzy-PID）算法理论应用到微位移的主动隔振控制中，在实验室虚拟仪器工程平台 (labor atory virtual instrumentation engineering workbench，简称LabVIEW)环境下开发了整个系统的算法控制程序，分别在扫频、随机和正弦激励信号下进行了微位移主动隔振实验。实验结果表明，受控后的振动位移大幅度降低，验证了该方法对微位移主动隔振的有效性。
In order to isolate the vibration for precision instruments, we present a smart micro-displacement active vibration isolation system that was composed of a piezoelectric ceramic actuator, sensor and controller. Based on the national instruments (NI) data acquisition system and the B&K (Brüel & Kj?r) vibration exciter, we built a detailed experimental platform for the micro-displacement active vibration isolation control system. We developed a fuzzy-proportional integral derivative (Fuzzy-PID) control algorithm using laboratory virtual instrumentation engineering workbench (Lab VIEW) and applied it to the active vibration control system. We completed the control experimental research under sweep, random and sine excitation signals, and were able to obtain a significant displacement reduction of the active vibration isolation system no matter what the excitation signal was. The results verified the validity of the micro-displacement active vibration isolation system and provided an important theoretical foundation for its design and application to precision instruments and Micro-nano equipment.