Large Thrust Trans-scale Precision Positioning Stage Based on Inertial Stick-Slip Driving

For the smaller thrust, it is difficult to achieve 3D trans-scale precision positioning based on previous stick-slip driving. A large thrust trans-scale precision positioning stage is studied based on the inertial stick-slip driving. The process of the movement is divided into two steps, i.e., the ″sliding″ phase and the ″stickness″ phase. In the whole process, the kinematics model of the inertial stick-slip driving is established, and it reveals some factors affecting the velocity of inertial stick-slip driving. Furthermore, a simulation of movement is preformed by Matlab-Simulink software, and the whole process of the inertial stick-slip driving is displayed. After one experimental prototype is designed, the back and forth velocity is tested. Finally, the simulation verifies the accuracy of the kinematics model.