A Novel 2D Piezo-Nanopositioning Stage Based on Triangle Amplifier Mechanism

To satisfy the demand on dynamic performance and load characteristics of piezoelectric actuators in aeronautics and astronautics fields, a novel 2D piezo-nanopositioning stage utilizing a triangle amplifier mechanism is proposed. The stage is driven by piezoelectric rhombic units in both X and Y directions, which is composed of four piezoelectric stacks. Theoretical static model develops the relationships among output force, displacement, static stiffness and the structure parameters of the platform. The experimental results of the prototype show that the output performances in X and Y directions are similar and both of them are within an 8% deviation from the theoretical values. The stroke of the stage reaches 41.6 μm and 42.9 μm in X and Y directions, respectively, and is directly proportional to the amplitude of the input sinusoidal voltage 10 Hz. Moreover, the nano-positioning stage is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic, whose minimum output displacement step is 50 nm.