W-Pt微纳热电偶批量制备装置的设计与实现
Design and realization of batch preparation system for W-Pt micro-nano thermocouple

为了提高能应用于单细胞温度测量实验的W-Pt微纳热电偶的制作效率和稳定性,采用自动化控制技术完成W-Pt微纳热电偶批量制备系统的设计和实现.采用模块化设计方式,分别完成系统整体结构、电气控制系统部分的设计与实现,采用扫描电子显微镜、光学显微镜和水浴定标系统研究该系统制作的W-Pt微纳热电偶参数,包括W针尖端曲率半径、尖端锥角、裸露基极长度和Seeback系数.研究表明:该系统可实现快速制作性能稳定的W-Pt微纳热电偶,制作的大部分热电偶尖端曲率半径小于500 nm,锥角小于18°,裸露基极长度小于100 μm,Seeback系数为4~8 μV/K,可很好地应用于单细胞温度测量实验.
To improve the production efficiency and stability of W-Pt micro-nano thermocouple applied to single cellular temperature measurement, a batch preparation system for W-Pt micro-nano thermocouple was designed and realized with automatic control technology. The overall structure of the system and the electrical control system was designed and realized based on the modular design method. The parameters of W-Pt micro-nano thermocouple made by the system, including the tip radius of curvature, the tip cone angle, the length of exposed tip, the Seeback coefficient, were investigated by scanning electron microscopy, optical microscopy and the water calibration system. The results show that the system can quickly make W-Pt micro-nano thermocouples with steady performance in a bulk volume. For most of the thermocouples made in this way, the tip radius of curvature is less than 500 nm, the cone angle is less than 18°, the length of exposed tip is less than 100 μm, and the Seeback coefficient is 4 to 8 μV/K. The W-Pt micro-nano thermocouples made by the system can be applied to single cellular temperature measurement