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- 2016
电子能量损失谱元素定量分析的条件优化
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Abstract:
研究了电子能量损失谱元素定量分析的影响因素, 测定了能量损失谱仪的重要实验参数：接收角和汇聚角．在不同的实验条件下收集了一系列标准样品, 如氮化硼、氧化铁、氧化铝、氧化锌、硫化锌、氧化钛、氧化硅和氧化锆的电子能量损失谱, 对其元素定量分析的影响因素, 包括入口光栏直径、非弹性散射截面计算模型、积分区间宽度和背底拟合函数等进行了探讨, 深入分析每个因素对电子能量损失谱的定量结果影响, 得到了电子能量损失谱元素定量分析的优化条件．
The influencing factors of quantitative electron energy loss spectroscopy(EELS) element analysis were studied. Two important experimental parameters, collection and convergence angles were first determined, and EELS spectra from a series of standard samples, such as BN, Fe2O3, Al2O3, ZnO, ZnS ,TiO2, SiO2 and ZrO were then obtained. The quantitative analysis was made considering different factors such as diameter of entrance aperture, inelastic scattering cross-section calculation models, integral width, spectrum background fitting function etc. After a thorough discussion of these factors, the optimal condition for EELS element quantification was established
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