气体静压轴承设计及关键零件加工工艺研究
Aerostatic Bearing Design and study on Processing Technology for Key Parts

气体静压主轴广泛地应用于精密、超精密机床设备中，其核心零件的加工精度是主轴性能优劣的重要影响因素。本文以自主设计的气体静压止推轴承为例，分析了典型制造误差对轴承承载力及刚度等性能的影响，以误差分析结果为基础给出静止推板的设计精度。对于亚微米精度要求的静止推板，针对其装夹微变形问题，提出了变形误差补偿车削原理，即在机床上按吸附变形误差的反误差进行加工，使静止推板在去除真空吸附后的自由状态下能达到高的面形精度。对？188 mm的静止推板圆环面进行了补偿加工实验，面形误差快速收敛到1 μm以下，达到了高精度的加工要求。
The Aerostatic Spindle is widely used in the precision and ultra precision machinery, and the machining precision for key parts has a significant impact on the performance of the spindle. Taking the aerostatic thrust bearing designed by ourselves for an example, the effect which the typical manufacturing errors may have on the performance such as load capacity and stiffness of the bearing is analyzed. Based on the results of the error analysis, the design precision is defined. Considering the deformation of the static pushing plate caused by the vacuum suction with the requirement of submicron precision, a kind of error compensation cutting theory is put forward; in other words, the static thrust surface is machined to the opposite of the suction deformation error and the surface precision will be high when the vacuum suction is eliminated. An error compensation cutting experiment was carried out on the static push plate with the diameter of 188 mm and the error of the static thrust surface converged to 1μm below rapidly which meets the requirements of high machining precision for the static pushing plate