惯性冲击式压电精密定位装置的设计
Design of Piezoelectric Precision Positioning Device based on Inertial Impaction

为了实现对负载纳米级的精密定位，提出了一种利用压电材料作为驱动元件的三驱动足精密定位装置。设计了基于惯性冲击原理的精密定位装置的结构，介绍了其具体工作过程，并对驱动足的工作过程进行了理论分析。制作样机并搭建了实验系统，采用显微镜物镜进行了定位性能的测试。实验结果表明：在锯齿波电压信号的驱动下，通过改变驱动电压信号的占空比，该精密定位装置能够实现所夹持负载的双向直线运动，当电压值为80 V；电压频率为80 Hz时，该装置的位移分辨率可以达到100 nm的精度，且运行平稳，工作性能良好，步距均匀，可以实现所夹持负载纳米级的定位要求。
In order to achieve nanometer level precision positioning of objects, this paper presents a three driven foot precision positioning device using piezoelectric material as the driving element. T the design principles of precision positioning device based on inertial impact is described, and its specific work process is introduced Then the mathematical analysis of the working process of driven foot is carried out. Made A prototype and experimental system is built and a microscope objective lens is used to test the positioning precision. The results show that by changing the duty cycle of the driving voltage signal, the precision positioning device is capable of bi-directional linear movement of the clamping load with the sawtooth signal as the driving voltage .When the voltage is 80V and the voltage frequency is 80 Hz, the precision positioning device can achieve the minimum resolution of 100 nm, and it works smoothly with good performance, meeting the requirement of nanometer-scale positioning