一种压阻式压力传感器稳健设计方法研究
Research on Robust Design Method of a Piezoresistive Pressure Sensor

利用ANSYS软件对膜片应力进行仿真分析，对得到的应力数据沿电阻条所在路径积分，计算出力敏电阻在外界压力下阻值的变化；将Taguchi方法应用到传感器的设计中，通过对力敏电阻尺寸及其位置参数进行分析，确定影响因素和水平，利用正交实验和信噪比分析参数的稳健性，最终选出性能最优的设计参数组合。此方法能够提高传感器的性能与质量。
ANSYS software is used to simulate and analyze the stress of the membrane, then integration along the path of resistance to calculate the changes of resistance with the result stress date. Taguchi robust design method will be applied in the design of the sensor, and the effect factors and levels were determined with analyzing the parameters of varisitor size and location. The orthogonal experiment design and signal to noise ratio were calculated to carry out the robustness of parameters. Finally, the optimal combination of parameters is selected. This method can improve the performance and quality of the piezoresistive pressure sensor