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-  2015 

BaxSr1-xTiO3微弧氧化铁电薄膜微观结构及电学性能
Microstructure and Electrical Property of BaxSr1-xTiO3 Ferroelectric Thin Film Prepared by Microarc Oxidation

DOI: 10.3969/j.issn.1001-0548.2015.05.023

Keywords: 铁电薄膜,电学性能,BaxSr(1-x),微弧氧化,微观结构

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Abstract:

用分析纯Ba(OH)2·8H2O和Sr(OH)2·8H2O配制电解液,采用微弧氧化法在工业纯钛板(99.5%)表面原位生成BaxSr(1-x)TiO3铁电薄膜。研究了Ba2+/Sr2+对薄膜晶体结构、物相组成、表面形貌及表面粗糙度的影响,并对薄膜的介电、铁电性能进行了表征。结果表明,Ba2+/Sr2+对薄膜晶体结构无影响,但随Ba2+含量增加,BaxSr(1-x)TiO3薄膜中x值与理论值偏离越大;随电解液浓度及Ba2+/Sr2+增加,薄膜表面变得疏松,散布的颗粒尺寸增大,表面粗糙度值增加。在Ba2+和Sr2+各为0.2 mol/L时所得薄膜表面平整度及致密性最好,表面粗糙度值最小,其在100 Hz条件下的介电常数为454.8,且具有饱和电滞回线,有较好的商业化应用前景。

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