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- 2018
基于ANSYS的场发射阵列阴极焊接应力研究
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Abstract:
该文基于ANSYS平台模拟了场发射阵列阴极与钼电极钎焊工艺参数对钎焊层等效应力的影响，并根据仿真结果进行了实验验证。仿真结果表明，当钎焊温度为850℃时，最大等效应力最小；当降温速率为23℃/min时，最大等效应力最大，之后随降温速度的增加而迅速减小；在降温过程中，高温区逐渐向硅基底扩展，温度沿焊缝方向呈对称分布，焊缝中心温度高，两边温度低。测试结果表明，钎焊接头组织致密，焊缝结合良好，没有裂纹和空洞等缺陷，且钎料对硅基底的影响很小。这是一种可行的、低成本的实现硅基场发射阵列阴极焊接的有效方法。
| [1] | MOREV S P, ABAN'SHIN N P, GORFINKEL B I, et al. Electron-optical systems with planar field-emission cathode matrices for high-power microwave devices[J]. Journal of Communications Technology and Electronics, 2013, 58(4):357-365. |
| [2] | HATA K, NAGAI R, NAGAI S. Newly designed high resolution X-ray microscope with a liquid lithium field emission electron source[C]//25th International Vacuum Nanoelectronics Conference. Jeju Island, Korea:[s.n.], 2012, 7:74. |
| [3] | 李景湧. 有限元法[M]. 北京:北京邮电大学出版社, 2002. LI Jing-yong. Finite element method[M]. Beijing:Beijing University of Posts and Telecommunications Press, 2002. |
| [4] | FOWLER R H, NORDHEIM L. Electron emission in intense electric fields[J]. Proceedings of the Royal Society A Mathematical Physical & Engineering Sciences, 1928, 119:173-181. |
| [5] | SHOULDERS K R. Microelectronics using electron-beam-activated maching techniques[J]. Advances in Computers, 1961, 39:3504-3505. |
| [6] | IWAI Y, KOIKE T, HAYAMA Y, et al. X-ray tube with a graphite field emitter inflamed at high temperature[J]. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2013, 31(2):02B106. |
| [7] | WATANABE N, TANAKA M, SHIMIZU T. Characterization of an electron emitting tip by field emission microscope and scanning probe microscope[J]. Journal of the Vacuum Society of Japan, 2015, 58(4):131-133. |
| [8] | SPINDT C A, BRODIE I, HUMPHREY L, et al. Physical properties of thin-film field emission cathodes with molybdenum cones[J]. Journal of Applied Physics, 1976, 47(12):5248-5263. |
| [9] | WEI W, ZHENG Y X, YUAN X Y, et al. Carbon nanotube field emission electron gun for traveling-wave tube[C]//2015 IEEE International Vacuum Electronics Conference. Beijing:IEEE, 2009, 4:1-2. |
| [10] | ULISSE G, BRUNETTI F, TAMBURRI E, et al. Carbon nanotube cathodes for electron gun[J]. IEEE Electron Device Letters, 2013, 34(5):698-700. |
| [11] | IWAI Y, MURAMATSU K, TSUBOI S, et al. X-ray tube using a graphene flower cloth field emission cathode[J]. Applied Physics Express, 2013, 6(10):105102. |
| [12] | JEONG J W, KIM J W, KANG J T, et al. A vacuum-sealed compact X-ray tube based on focused carbon nanotube field-emission electrons[J]. Nanotechnology, 2013, 24(8):085201. |
| [13] | WEI L, ZHANG X B, WANG B P, et al. A stable field-emission light source with ZnO nanoemitters[J]. IEEE Electron Device Letters, 2008, 29(5):452-455. |
| [14] | WU H C, YOUH M J, LIN W H, et al. Fabrication of double-sided field-emission light source using a mixture of carbon nanotubes and phosphor sandwiched between two electrode layers[J]. Carbon, 2012, 50(13):4781-4786. |
