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-  2017 

C/C复合材料的非晶SiO2涂层制备及其生物活性
Preparation and bioactivity of amorphous SiO2 coated C/C composites

DOI: 10.13801/j.cnki.fhclxb.20161110.003

Keywords: C/C复合材料,化学气相沉积,非晶SiO2涂层,生物活性,沉积温度
C/C composites
,chemical vapor deposition,amorphous SiO2 coating,bioactivity,deposition temperature

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Abstract:

以正硅酸乙酯(TEOS)为前驱体,N2为载气,在C/C复合材料表面通过低压化学气相沉积(LPCVD)得到非晶SiO2涂层。研究了沉积温度对涂层成分、涂层形貌和沉积速率的影响。通过XRD、XPS、FTIR、SEM和EDS等测试手段,对涂层的成分、微观形貌以及模拟体液浸泡后材料的生物活性进行了表征和分析。实验结果表明:涂层的主要物相为非晶SiO2;模拟体液浸泡至35天,样品表面生成类骨羟基磷灰石,与未涂层的C/C复合材料相比,表明非晶SiO2涂层具有良好的生物活性。随着沉积温度的增加,沉积速率增大,涂层包覆更加完整;SiO2颗粒由不规则形状转变为规则的球形,最后转变成多边形。 Amorphous SiO2 coating was prepared on the surface of carbon/carbon composites by low pressure chemical vapor deposition (LPCVD) with TEOS as precursor and N2 as carrier gas. The effects of deposition temperature on the component, morphology and deposition rate of the coating were studied. The components and morphologies of the coatings were analyzed by XRD, XPS, FTIR, SEM and EDS, and the bioactivity of film was detected by the in vitro simulated body fluid (SBF) soaking. The results show that the main phase of the coating is amorphous SiO2, and a thin layer of bone-like hydroxyapatite is deposited on the surface of the SiO2 coating after soaking at 35 days which proves the coating has better bioactivity than that of the bare substrate. The deposition rate is increased with the development of temperature, and at the same time, the morphology of SiO2 particles change from irregular to spherical and polygon shape finally. 国家高技术研究发展计划-863计划(2015AA033503);国家自然科学基金青年基金(31500091)

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