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- 2016
基于CCR带并行腔双集束型设备调度方法
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Abstract:
摘要 为有效解决450mm晶圆制造中带有并行处理腔的集束型设备群调度问题，提出了基于产能约束资源（CCR）的调度方法。首先，综合考虑多品种加工、晶圆驻留和资源约束等特征，以系统总完工时间最小作为目标，建立带并行腔双集束型设备调度数学模型；其次，为优化机械手作业顺序，对CCR实施锁定-收紧-松弛（LTL）策略，构建了一种以CCR为界的分段调度算法；最后，进行了仿真实验分析。结果表明本文提出的算法是有效和有竞争性的。
Abstract：To effectively solve scheduling problems of multiple cluster tools of 450 mm wafer fabrication systems with parallel processing chambers, a scheduling method based on capacity constraint resource (CCR) was proposed. Firstly, with comprehensive consideration of the characteristics of different types of wafers, resources and residency constraints, a mathematical programming model of double-cluster tools with parallel chambers was established to minimize the makespan of the system. Then, to optimize manipulator movements by adopting locking-tightening-loosening (LTL) strategy to the CCR, a piecewise scheduling algorithm was constructed with the CCR．Finally, through the analysis of simulation experiments, the results indicate that the proposed algorithm is valid and competitive.
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