温度和He累积损伤对Er2O3薄膜相结构及结晶度的影响
Effect of temperature and He cumulative damage on Er2O3 film phase structure and crystallinity

采用反应磁控溅射法制备Er2O3薄膜，并利用X射线衍射仪（XRD），场发射扫描电子显微镜（SEM）对含He 的Er2O3薄膜的结晶情况、截面和表面形貌进行表征，结果表明：无He的Er2O3薄膜在500℃退火时相结构基本保持稳定，在700℃退火时Er2O3薄膜发生明显的单斜相向立方相的转变。而含He的Er2O3薄膜的结晶度可能与He的存在形式有关。掺氦量较小时，未形成He泡，由于He的引入Er2O3薄膜的结晶度下降；随着掺氦量增加，He泡形成带来很高的内压，而在高压下Er2O3单斜相更易保持稳定。
In this paper, Er2O3 films are prepared in mixing atmosphere by radio frequency magnetron sputtering method. The phase structures, surface and cross-section morphologies of Er2O3films are characterized by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The results show that the phase structure of the pure Er2O3 film is still stable under the annealed temperature of 500℃. However, with the annealing temperature increasing, the monoclinic phase of the Er2O3 film can transform into cubic phase at 700℃. In addition, for the Er2O3 film with He containing, the degree of crystallinity may be affected by He atoms. He bubbles can not be formed with small amount of He doped in, and the diffraction peak of the Er2O3 film decreased obviously comparing with that of the pure Er2O3 film. As the content of the doped He atoms increase, the monoclinic phase of the Er2O3 film becomes more stable under the high internal pressure due to the forming of He bubbles