负偏压对电弧离子镀CrAlN涂层组织和性能的影响

摘要 采用电弧离子镀技术在高速钢基底上沉积CrAlN涂层.对CrAlN涂层的表面形貌、微观组织、显微硬度、结合强度、摩擦学性能进行了分析，研究了负偏压对CrAlN涂层组织和性能的影响.结果表明:在一定范围内随着负偏压的增加，涂层表面大颗粒数量逐渐减少，涂层变得更加致密;但过大的负偏压导致离子轰击作用过强，使涂层表面再次出现缺陷.当负偏压为 -200V时，涂层的晶粒尺寸最小，并具有良好的结晶度.涂层的显微硬度和结合强度均随负偏压的增加呈现出先增加后减小的趋势. 当负偏压为 -200V时，显微硬度达到最大值，为28.6GPa，同时具有最好的摩擦学性能.
Abstract：Using arc ion plating， CrAlN coatings were deposited on high speed steels. The effects of the negative bias voltage on microstructure and properties of the CrAlN coatings were investigated through analyzing surface morphologies， microstructure， microhardness， adhesion strength and tribological properties. The results showed that with the increase of the negative bias voltage， the surface macroparticles reduced gradually and the coating became denser. However， further increasing the negative bias voltage over -200V， the ion bombarding was so strong that many defects reappeared on the coating surface. Therefore， the grain size reached a minimum value and the coating was well crystallized at the bias voltage of -200V. Moreover， it was found that the microhardness and adhesion strength firstly increased and then decreased with the increase of the negative bias voltage. When the voltage was -200V， the microhardness reached the maximum value of 28.6GPa and the coating performed the best tribological properties.