大型光学表面纳米精度制造

纳米精度光学表面在光刻技术、同步辐射、空间观测和惯约聚变等领域有重大需求。随着装备性能需求的不断提升，这些光学系统对光学零件面形精度和表面质量的要求几乎接近于物理极限，对光学制造技术提出了更高挑战，使光学制造成为纳米制造技术的发展前沿。通过攻克纳米量级材料去除的稳定性、复杂曲面可控补偿和装备运动轴性能设计等关键问题，掌握了以磁流变和离子束抛光技术为代表的可控柔体抛光技术，利用自主研发的抛光制造装备和工艺实现了典型光学零件的纳米精度制造，为国家相关科技项目的顺利实施提供有力的制造技术支撑。
Nano-precision optical surfaces are highly demanded in fields of lithography, synchrotron radiation, space observation and inertial confinement fusion. With the performance rising of equipment, the surface accuracy and roughness of optical elements are further strictly required, which is approaching the theoretical physical limitation. The rising demands bring about tougher challenges for optical fabrication, and push the technology to the frontier in the nano-precision fabrication area as well. Magnetorheological polishing and ion beam were figured in this research: the stability of material removal rate in nano-level, controllable compensation of complex asphere and dynamics design of equipment axes. The self-developed innovation polishing equipment was produced and the nano-precision fabrication of typical optical elements was realized, which provides strong support for relative science programs of our country, in terms of fabrication technology.