长方体类光学元件形位误差高精度测量方法

如何实现长方体元件光学面形位误差的高精度测量以及怎样利用测量数据对这些误差进行修正加工是制造过程中的主要问题。提出一种基于波面干涉的长方体类光学元件形位误差测量方法，借助大口径干涉仪和高精度端齿盘搭建测量系统，实现了长方体类光学元件1μm/400mm精度的平行度和垂直度测量，获得了高精度的形位误差综合分布数据，并利用磁流变、小磨头数控抛光等现代光学加工手段实现了此类光学元件的高精度加工。
How to realize the high-precision measurement of the shape and position errors of the cuboid optical element and how to use the measurement data to correct these errors are the main problem in the manufacturing process. A shape and position errors measurement method of the cuboid optical elements based on the wave-front interference theory was presented and the measurement system with large aperture instrument and high-precision indexing plate was built. With the help of this system, the parallelism and verticality measurement of the cuboid optical element in the accuracy of 1μm/400mm was achieved and the high-accuracy integrated distribution data of shape and position errors were obtained. The high-accuracy machining of this kind of optical element was achieved by using modern optical machining technology as magnetorheological finishing and computer controlled optical surfacing.