音圈电机驱动的快刀伺服系统性能测试

研发了一种新的音圈电机驱动的超精密快刀伺服系统，行程达到30mm，最大加速度为920m/s2。通过实验手段获得系统的运动模型，用于控制器的设计。针对一类典型的光学复杂结构曲面-微小透镜阵列进行加工，并对加工结果进行测试与分析。测试结果表明，所研发的快刀伺服系统达到了加工技术要求，为该系统在实际加工中更广泛的应用打下了基础。
A novel fast tool servo system driven by a voice coil motor has been developed，which has the total stroke of 30mm and the maximum acceleration of 920m/s2. The system model was obtained by the experimental process, which was used to design the controller. The micro-lens array, a typical optical surface with complex structure, which was machined, and the experimental results were tested and analyzed. Experimental results indicate that the performances of the developed fast tool servo system satisfy the machining requirements. A good foundation for future application was built in real manufacture.