三维阶梯结构微混合器设计、制作及性能分析

为改善微纳尺度下流体的混合效果，在聚甲基丙烯酸甲酯（PMMA）基底材料上，设计制造了一款新型三维阶梯结构微混合器.混合器由一个T-型进样沟道和6个三维阶梯混合单元组成，采用超精密雕刻机在PMMA基片制作微米级结构，利用有机溶剂混溶浸泡法，在低温常压条件下键合得到.数值仿真结果表明：混合器效率受到台阶结构尺寸和流体速度的影响，当0.1 ≤ Re ≤ 5时，混合腔横截面的浓度方差σ < 0.1，接近充分混合；当流速在1~20 mL/h范围内时，将混合器用于微量溶液pH的调节取得了理想的结果.
To improve the fluid mixing effect under micro-nano scale condition, we designed and manufactured a novel micro mixer with three-dimensional step structure based on the polymethyl methacrylate (PMMA) substrate material. The mixer was composed by one T-shaped inlet channel and six three dimensional step mixing units. The mixer was fabricated by using ultra-precision engraving machine and bonded by miscible organic solvents bonding method at the atmospheric pressure and low temperature conditions. Then, a series of numerical simulations were executed to optimize the step structures and investigate the mixing efficiency. The results showed that, when the Reynolds number was between 0.1 and 5, the concentration variance of mixing chamber cross section was less than 0.1. The reagent was close to the uniform mixture. When the flow rate within 1~20 mL/h, the mixer can achieve on precise regulation of solution pH. The micro machining technology and miscible organic solvents bonding method which were used for fabricate the 3D step micromixer are convenient and cost-effective. The mixer was conducive to the further promotion and application of microfluidic chips.