Comb-drive devises
have been widely applied in many fields. However, the application of high
frequency sensor, such as rocket chamber, still remains problems. In this work,
a finite element code was used for the design, optimization and visualization
of a comb drive accelerator. In the simulation results, the post-optimization
design has high performance in high frequency oscillation operating
environment. The optimization is based on the ideal eigenfrequency and
Nelder-Mead method. The 3-D working conditions are realized by testing and
comparing the time and frequency domain of pre-optimized and optimized design
whose frequency ranges from 2000 Hz to 5000 Hz. Finally, the electric
potential and capacitance in comb drive are visualized, which shows the better electric signals and displacements.
References
[1]
Wiak, S., Smólka, K., Dems, M. and Komeza, K. (2006) Numerical Modeling of 3D Intelligent Comb Drive Accelerometer Structure: Mechanical Models. COMPEL—The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, 25, 697-704. https://doi.org/10.1108/03321640610666862
[2]
Hirano, T., et al. (1992) Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators. Journal of Microelectromechanical Systems, 1, 52-59.
https://doi.org/10.1109/84.128056
[3]
Xie, H., Erdmann, L., Jing, Q. and Fedder, G.K. (2000) Simulation and Characterization of a Cmos Z-Axis Microactuator with Electrostatic Comb Drives. Proc. 3rd Int’l. Conf. on Modeling and. Simulation of Microsystems (MSM 2000), San Diego, CA, 27-29 March 2000, 181-184.
[4]
Xie, H. and Fedder, G.K. (2002) Vertical Comb-Finger Capacitive Actuation and Sensing for CMOS-MEMS. Sensors and Actuators A: Physical, 95, 212-221.
https://doi.org/10.1016/S0924-4247(01)00740-3
[5]
Xie, H. and Fedder, G.K. (2000) A CMOS Z-Axis Capacitive Accelerometer with Comb-Finger Sensing. Micro Electro Mechanical Systems 2000 (MEMS 2000), The Thirteenth Annual International Conference on IEEE, Miyazaki, Japan, 23-27 Jan 2000, 496-501.
[6]
Hah, D., Huang, S.T.Y., Tsai, J.C., Toshiyoshi, H. and Wu, M.C. (2004) Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators. Journal of Microelectromechanical Systems, 13, 279-289. https://doi.org/10.1109/JMEMS.2004.825314
[7]
Sun, Y., Fry, S.N., Potasek, D.P., Bell, D.J. and Nelson, B.J. (2005) Characterizing Fruit Fly Flight Behavior Using a Microforce Sensor with a New Comb-Drive Configuration. Journal of Microelectromechanical Systems, 14, 4-11.
https://doi.org/10.1109/JMEMS.2004.839028
