OALib Journal期刊
ISSN: 2333-9721
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plzt(28/0/100)薄膜的溶胶-凝胶制备技术及显微结构
Keywords: 溶胶—凝胶,plzt薄膜,外延生长,显微结构
Abstract:
?用溶胶—凝胶技术及回旋法,在石英玻璃和单晶si基片上制备plzt(28/0/100)多晶薄膜;在srtio3和α-a12o3单晶基片上外延生长择优取向薄膜.其外延关系分别为(100)plzt(28/0/100)//(100)srtio3和(100)plzt(28/0/100)//(0001)al2o3.用ir,xrd.rheed,sem和sims分析凝胶中杂质、凝胶的分子结构和薄膜的显微结构.结果表明,用溶胶—凝胶技术能制备出显微结构良好的多组份陶瓷薄膜.
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