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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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氮对纳米硅氮薄膜品化的影响
Keywords: 纳米硅氮薄膜,晶态率,晶粒尺寸,电导率
Abstract:
？在电容式耦合等离子体化学气相沉积系统中,用高氢稀释硅烷和氮气为反应气氛制备纳米硅氮(nc-sinx:h)薄膜结果表明:当n_2/sih_4气体流量比(xn)从1增加为4时,薄膜的晶态年从58%降至14%,晶粒尺寸从10nm降至5um,n/si含量比从0.03增至0.12.当xn≥5,则生成非晶硅氮(a-sinx:h)薄膜.当xn从1增加为10时,薄膜暗电导率从10￣(-5)(ωcm)￣(-1)降至10￣(-11)(ωcm)￣(-1),具有逾渗行为,这与薄膜的晶态率紧密相关.
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