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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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金刚石薄膜品质及其表征
Keywords: 金刚石薄膜,缺陷,掺杂,阴极荧光
Abstract:
？阐述了金刚石薄膜中成分、结构、夹杂尤其是化学与结构缺陷对热、电、光学、机械、化学性质的影响.介绍了薄膜品质检测、表征方法的新进展.表明品质表征有向点缺陷类别及其浓度分布、掺杂和偏折方向深入的趋势.为了控制品质、增强薄膜特性、开发新的器件,必须探求更完善的分析方法建议在sem-wdcl(阴极荧光扫描电子显微分析装置)上,在确保‘cl’(阴极荧光)最高收集效率条件下,力求不降低原有sem的空间分辨率;在‘cl’谱对杂质有很高灵敏度基础上完善定量分析能力,结合数字图象分析,取得了膜中缺陷、掺杂、偏析乃至非金刚石碳的分布统计
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