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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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快速热退火对原子层淀积铂纳米颗粒的影响
Keywords: 金属材料,pt纳米颗粒,原子层淀积,快速热退火
Abstract:
？以(mecp)pt(ch3)3和o2为反应源,采用原子层淀积(ald)技术在al2o3衬底上制备pt纳米颗粒,研究了在氮气中快速热退火对pt纳米颗粒的特性的影响。结果表明,随着退火温度从700℃升高到900℃,pt纳米颗粒尺寸逐渐增大,颗粒之间分离愈加清晰,形貌趋向球形,但颗粒密度稍有降低。随着在800℃退火时间从15s增加到60s,pt纳米颗粒的尺寸逐渐增大,尺寸分布变得更加弥散,颗粒的密度逐渐降低；其中退火15s后的pt纳米颗粒密度高(9.29×1011cm-2)、分布均匀、分离清晰。900℃退火后在pt纳米颗粒中出现部分氧化态的pt原子,其原因可能是在高温下pt纳米颗粒与al2o3薄膜之间发生了界面化学反应。
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