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OALib Journal期刊
ISSN: 2333-9721
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脉冲偏压对矩形平面大弧源离子镀tin膜层性能的影响
Keywords: 无机非金属材料,离子镀,矩形靶
Abstract:
？采用矩形平面大弧源离子镀技术在201奥氏体不锈钢基体表面制备tin硬质薄膜,研究了脉冲偏压对tin膜层的表面形貌、相结构、硬度和耐磨性能的影响.结果表明,随着脉冲偏压的增大,薄膜中大颗粒的数目先增加后减少,这是大颗粒受到离子拖曳力和电场力双重作用的结果.存在一个最佳的脉冲偏压,使得制备出的tin膜层具有较高的i(111)/i(200)比例和较高的耐磨性.脉冲偏压为-300v时制备的tin膜层具有最好的综合性能.
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