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OALib Journal期刊
ISSN: 2333-9721
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基于磁控溅射制备纳米微晶niox薄膜的方法
Keywords: 无机非金属材料,磁控溅射,纳米微晶态,电致变色,niox薄膜
Abstract:
？使用一种配套于磁控溅射设备的基片液氮冷却装置制备了小颗粒度纳米微晶niox电致变色薄膜.当溅射参数完全相同时,借助于对基片的冷却可有效控制并降低niox薄膜的晶粒尺度.冷却基片所制备的niox薄膜的电致变色性能明显优于室温时制备的薄膜,且该薄膜的o/ni比率也明显高于室温时制备的niox薄膜的o/ni比率.
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