全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

制备方法对w--10\%ti合金组织性能的影响

Keywords: 金属材料,w--ti合金,熔渗,液相烧结,固溶体,密度

Full-Text   Cite this paper   Add to My Lib

Abstract:

?以高纯钨粉、钛粉和ta2钛片为原料,分别采用液相烧结法和熔渗法制备了ti含量为10\%的w--ti合金;测量了w--10%ti合金的密度和杂质(c、n和o)含量,研究了不同方法制备的w--ti合金的相组成和微观形貌.结果表明,熔渗法制备的w--ti合金致密度达94%以上,相结构由含有较多富ti相的固溶体β(w/ti)组成;液相烧结的合金致密度为90%左右,组织相对均匀;两种方法制备的合金杂质(c、n和o)含量均较低.探讨了液相烧结制备w--10%ti合金时固溶体扩散形成的机理.

References

[1]  1r.j.gutmann,t.p.chow,a.e.kaloyeros,thermalstabilityofon–chipcopperinterconnectstructures,thinsolidfilms,262(1–3),177(1995)
[2]  2g.raghavan,c.chiang,p.b.anders,diffusionofcopperthroughdielectricfilmsunderbiastemperaturestress,thinsolidfilms,262(1–2),168(1995)
[3]  3a.g.dirks,r.a.m.wolters,a.j.m.nellissen,onthemicrostructurepropertyrelationshipofw–ti–(n)diffusionbarriers,thinsolidfilms,193–194,201(1990)
[4]  4h.ramarotafika,g.lemperiere,influenceofad.c.substratebiasontheresistivity,composition,crystallitesizeandmicrostrainofw–tiandw–ti–nfilms,thinsolidfilms,266(2),267(1995)
[5]  6c.e.wickersham,jr.,j.e.poole,j.j.mueller,particlecontaminationduringsputterdepositionofw–tifilms,j.vac.sci.technol.a,10,1713(1992)
[6]  13xiechengmu,titaniumandtitaniumalloycasting(beijing,chinamachinepress,2005)p.14
[7]  (谢成木,钛及钛合金铸造(北京,机械工业出版社,2005)p.14)
[8]  14a.j.dunlop,hansrensing,methodformakingtungsten–titaniumsputteringtargetsandproduct,unitedstatespatent,4838935(1989)
[9]  5wangzanhai,wangxingming,chumaoyou,preparationofw–tisputteringtargetsunderinertatmosphere,chinesejournalofraremetals,30(5),688(2006)
[10]  (王赞海,王星明,储茂友,惰性气体热压法制备w/ti合金靶材研究,稀有金属,30(5),688(2006))
[11]  7chifunglo,paulgilman,particlegenerationinw–tideposition,j.vac.sci.technol.a,17(2),608(1999)
[12]  8alirezanouri,chenxiaobo,yuncang,synthesisofti–sn–nballoybypowdermetallurgy,mater.sci.eng.,a,485,562(2008)
[13]  9c.e.wickersham,methodofproducingtungsten–titaniumsputtertargetsandtargetsproducedthereby,unitedstatespatent,5234487(1993)
[14]  10j.laszo.kecskes,ianw.hall,microstructuraleffectsinhot–explosively–consolidatedw–tialloy,journalofmaterialsprocessingtechnology,94,247(1999)
[15]  11a.j.dunlop,c.e.waterman,t.brat,effectsoftitanium–tungstentargetprocessingmethodsondefectgenerationduringverylargescaleintegrateddevicefabrication,vac.sci.tech.a,10(2),305(1992)
[16]  12panjinsheng,tongjianmin,tianminbo,materialssciencefoundation(beijing,tsinghuauniversitypress,1998)p.450
[17]  (潘金生,仝健民,田民波,材料科学基础(北京,清华大学出版社,1998)p.450)

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133