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OALib Journal期刊
ISSN: 2333-9721
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自支撑硼掺杂金刚石膜残余应力和微观应力的xrd分析
Keywords: 无机非金属材料,cvd金刚石膜,硼掺杂,xrd,残余应力,微观应力
Abstract:
？利用xrd(包括sin2？φ法)研究了电子辅助热灯丝化学气相沉积法(ea--hfcvd)生长的自支撑硼掺杂多晶金刚石薄膜的残余应力和微观应力.结果表明,薄膜的残余应力为压应力,随着薄膜制备过程中硼流量的增加,应力值有减小的趋势.薄膜的微观应力随着硼流量的增加,由拉应力转变为压应力然后又转变为拉应力.残余应力和微观应力的变化归因于一定量的硼掺杂导致的多晶膜中晶粒尺寸、晶面取向及孪晶变化的共同作用.
| [1] | 1j.e.field,thepropertiesofnaturalandsyntheticdiamond(newyork,academicpress,1992)
|
| [2] | 2jinzengsun,jiangzhigang,huhang,caoqingzhong,thegrowthbehaviorandinternalstressofdiamondthickfilmssynthesizedbyhot–cathodedc–pcvd,newcarbonmaterials,18(3),65(2003)
|
| [3] | (金曾孙,姜志刚,胡航,曹庆忠,热阴极dc--pcvd方法制备的金刚石厚膜的生长特性和内应力,新型炭材料,18(3),65(2003))
|
| [4] | 3zhangming,hejiawen,theeffectoffibertextureonthestressanalysisofthinfilmsbyx–raydiffraction,materialsformechanicalengineering,25(5),21(2001)
|
| [5] | (张铭,何家文,丝织构对薄膜x射线残余应力分析的影响,机械工程材料,25(5),21(2001))
|
| [6] | 4zhaonanfang,yangqiaoqin,zhaolihua,xiaohanning,lideyi,intrinsicstressindiamondfilmgrowthbyhotfilamentcvd,miningandmetallurgicalengineering,18(3),67(1998)
|
| [7] | (赵南方,杨巧勤,赵立华,肖汉宁,李德意,热丝cvd法金刚石薄膜宏观内应力分析,矿冶工程,18(3),67(1998))
|
| [8] | 5y.h.lee,k.j.bachmann,j.t.glass,y.m.legrice,r.j.nemanich,vapordepositionofdiamondthinfilmsonvarioussubstrates,appl.phys.lett.,57(12),1916(1990)
|
| [9] | 6m.mermoux,b.marcus,a.crisci,a.tajani,e.gheeraert,e.bustarret,internalstressesin{111}homoepitaxialcvddiamond,diamond.relat.mat,13(2),329(2004)
|
| [10] | 7s.a.stuart,s.prawer,p.s.weiser,growth–sectordependenceoffinestructureinthefirst–orderramandiamondlinefromlargeisolatedchemical–vapor–depositeddiamondcrystals,appl.phys.lett.,62(11),1227(1993)
|
| [11] | 8s.chowdhury,m.t.laugier,j.henry,xrdstressanalysisofcvddiamondcoatingsonsicsubstrates,int.j.refract.met.hardmater.,25(1),39(2007)
|
| [12] | 9h.windischmann,k.j.gray,stressmeasurementofcvddiamondfilms,diamondrelat.mat.,4(5–6),837(1995)
|
| [13] | 10n.g.ferreira,e.abramof,e.j.corat,v.j.trava–airoldi,residualstressesandcrystallinequalityofheavilyboron–dopeddiamondfilmsanalysedbymicro–ramanspectroscopyandx–raydiffraction,carbon,41(6),1301(2003)
|
| [14] | 12h.windischmann,g.f.epps,yue.cong,r.w.collins,intrinsicstressindiamondfilmspreparedbymicrowaveplasmacvd,j.appl.phys.,69(4),2231(1991)
|
| [15] | 13lichunyan,preparationandelectricalpropertiesofboron–dopeddiamondfilms,ph.dthesis,jilinuniversity,(2006).
|
| [16] | 21m.s.haque,h.a.naseem,a.p.malshe,w.d.brown,astudyofstressinmicrowaveplasmachemicalvapordepositeddiamondfilmsusingx–raydiffraction,chem.vap.deposition,3(3),129(1997)
|
| [17] | 22zhuhongxi,maoweimin,fenghuiping,influenceoftextureonresidualstrainincvdfreestandingdiamondfilms,chinesejournalofmaterialsresearch,21(1),32(2007)
|
| [18] | (朱宏喜,毛卫民,冯惠平,织构对cvd自支撑金刚石薄膜残余应变的影响,材料研究学报,21(1),32(2007))
|
| [19] | 23s.k.choi,d.y.jung,h.m.choi,intrinsicstressanditsrelaxationindiamondfilmdepositedbyhotfilamentchemicalvapordeposition,j.vac.sci.technol.a,14(1),165(1996)
|
| [20] | 24baiyizhen,l¨uxianyi,hanxuemei,jinzengsun,l¨utianshan,baiyuan,influencesofdepositiontechnologiesonstress–strainpropertiesofthickdiamond,journalofjilinuniversity(scienceedition),44(5),784(2006)
|
| [21] | (白亦真,吕宪义,韩雪梅,金曾孙,吕天山,白媛,金刚石膜制备工艺对其应力--应变特性的影响,吉林大学学报(理学版),44(5),784(2006))
|
| [22] | 11m.hempel,m.h¨arting,characterisationofcvdgrowndiamondanditsresidualstressstate,diamond.relat.mat.,8(8–9),1555(1999)
|
| [23] | (李春燕,掺硼金刚石膜的制备及其电学性能研究,吉林大学博士学位论文,(2006))
|
| [24] | 14c.y.li,b.li,x.y.l¨u,m.j.li,z.l.wang,c.z.gu,z.s.jin,superconductivityinheavilyboron–dopeddiamondfilmspreparedbyelectronassistedchemicalvapourdepositionmethod,chinesephys.lett.,23(10),2856(2006)
|
| [25] | 15b.d.culllity,elementofx–raydiffraction,2nded.(london,addison–wesley,1978)
|
| [26] | 16i.c.noyan,t.c.huang,b.r.york,residualstress/strainanalysisinthinfilmsbyx–raydiffraction,crit.rev.solidstatemater.sci.,20,125(1995)
|
| [27] | 17i.h.choi,p.weisbecker,s.barrat,e.bauer,growthofhighlyorienteddiamondfilmsbythempcvdtechniqueusingco–h2,ch4–h2andch4–n2–h2gasmixtures,diamondrelat.mat.,13(4–8),574(2004)
|
| [28] | 18a.vanderdrift,evolutionaryselection:aprinciplegoverninggrowthorientationinvapourdepositedlayers,philipsres.rep.,22,267(1967)
|
| [29] | 19liuweiping,yuqingxuan,tianyuquan,liaoyuan,wangguanzhong,fangrongchuan,effectsofborondopingonthegrowthcharacteristicofdiamondfilm,journalofinorganicmaterials,20(5),1270(2005)
|
| [30] | (刘卫平,余庆选,田宇全,廖源,王冠中,方容川,硼掺杂对金刚石薄膜生长特性的影响,无机材料学报,20(5),1270(2005))
|
| [31] | 20danwu,y.c.ma,z.l.wang,q.luo,c.z.gu,n.l.wang,c.y.li,x.y.l¨u,z.s.jin,opticalpropertiesofboron–dopeddiamond,phys.rev.b,73(1),012501(2006)
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