OALib Journal期刊
透明导电膜zno:al的组织结构与特性
Keywords: 透明导电氧化物 ,简并半导体 ,zao薄膜
Abstract:
？zno:al（zao）是一种简并半导体氧化物薄膜材料，具有高的载流子浓度和大的光学禁带宽度，因而具有优异的电学和光学性能，极具应用价值。对于其能级高度简并的zao半导体薄膜材料，在较低的温度下，离化杂质散射占主导地位；在较高的温度下，晶格振动散射将成为主要的散射机制；晶界散射仅当晶粒尺寸较小（与电子的平均自由程相当）时才起作用。本文介绍了zao薄膜的制备方法、晶体结构特性、电学和光学性能以及载流子的散射机制。
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