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OALib Journal期刊
ISSN: 2333-9721
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si基微绝热结构plzt厚膜红外探测器阵列
Keywords: 无机非金属材料,非致冷红外探测器阵列,溶胶
Abstract:
？介绍了一种制备非致冷红外探测器阵列的新方法,此方法避免了使用传统的微电子机械系统(mems)工艺来加工微桥.研究了如何在si基片表面形成zno膜层网格状结构的方法.zno纳米粉末和plzt厚膜采用改进的溶胶--凝胶法制备.表征了zno纳米粉末的表面形貌和plzt厚膜的相组成,测量了plzt--8/53/47厚膜的铁电性和热释电性.结果表明,zno纳米粉末的粒径为40$\sim$70nm,plzt--8/53/47厚膜为纯钙钛矿相,其主结晶方向与底电极一致.plzt--8/53/47厚膜具有优良的热释电性能,其热释电系数$p$为8.21$\times$10$^{-8}$c/(cm$^{2}\cdot$℃),而矫顽场较小,25℃时+$e_{\rmc}$为32.0kv/cm,40℃时+$e_{\rmc}$仅为27.8kv/cm.
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