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OALib Journal期刊
ISSN: 2333-9721
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用于微测辐射热探测器的纳米vo_2薄膜
Keywords: 无机非金属材料,纳米二氧化钒薄膜
Abstract:
？用离子束溅射和后退火工艺制备了一种适用于微测辐射热探测器热敏材料的新型纳米结构二氧化钒(vo_2)薄膜材料,薄膜具有平均粒度8nm,在半导体相区具有电阻温度系数(tcr)为-7%/k,性能高于传统的vo_2材料(平均粒度为1-2μm,在半导体相区具有tcr约为-2%/k).基于纳米结构的vo_2薄膜材料的器件比基于传统的vo_2薄膜材料具有更高的性能,而两者的噪声基本相当.
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