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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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离子轰击能量对zrn/tialn纳米多层膜性能的影响
Keywords: 无机非金属材料,离子束辅助沉积(ibad)
Abstract:
？使用超高真空离子束辅助沉积系统(ibad)制备一系列具有纳米调制周期的zrn/tialn多层膜,研究了离子辅助轰击对薄膜性能的影响.结果表明:离子辅助轰击使大部分zrn/tialn多层膜的纳米硬度和弹性模量值高于两种个体材料硬度的平均值;离子的轰击和薄膜表面原子与轰击离子之间的动量传输提高了薄膜的致密度;当轰击能量为200ev时,多层膜的硬度最高(30.6gpa),弹性模量、表面粗糙度和摩擦系数等也明显改善.
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