OALib Journal期刊
ISSN: 2333-9721
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tin纳米薄膜的高硬度及其产生机制
Keywords: 无机非金属材料,tin纳米薄膜,超高硬度
Abstract:
?用脉冲直流多弧离子镀方法在w18cr4v高速钢基体上沉积具有纳米结构的tin薄膜,用xp纳米压入仪测量薄膜的硬度,研究了其硬度产生的机制.结果表明,厚度为2--3μm、晶粒尺寸约为13--16nm的tin薄膜,硬度为36--43gpa,远高于tin的本征硬度(22--24gpa).高温去应力退火实验证实,具有纳米结构的tin薄膜的超高硬度不仅是由沉积过程中载能粒子轰击产生的残余应力引起,面心立方结构的tin薄膜沿(111)密排面择优生长、纳米晶界强化以及膜层组织结构的致密性也是重要的原因.
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