|
OALib Journal期刊
ISSN: 2333-9721
费用：99美元
|
|
|
|
衬底偏压对线性离子束dlc膜微结构和物性的影响
Keywords: 无机非金属材料,？线性离子束,dlc薄膜,？微结构,力学性能,摩擦性能
Abstract:
？采用一种新型线性离子束pvd技术制备出大面积类金刚石薄膜(dlc膜),研究了衬底负偏压对薄膜微结构和物性的影响.结果表明:制备出的类金刚石薄膜在300mm？×100mm范围内纵向厚度均方差约10--12nm,横向薄膜厚度均方差约2--4nm.随着衬底偏压的提高,薄膜中sp3键的含量先增加后减小,在衬底偏压为-100v时sp$^{3}$键的含量最大;dlc膜的残余应力、硬度和弹性模量与sp3键的含量呈近似线性的关系,在衬底偏压为-100v时其最大值分别为3.1gpa、26gpa和230gpa.dlc薄膜的摩擦学性能与薄膜中sp3碳杂化键的含量密切相关,但是受衬底偏压的影响不大,其摩擦系数大多小于0.25.偏压对磨损的影响很大,在偏压比较低(0？-200v)时,薄膜的磨损率约为10-8mm3/n？?m,偏压升高到300v磨损率急剧提高到10-7mm3/n？?m.
| [1] | 1j.robertson,diamond-likeamorphouscarbon,materialsscienceandengineeringr,37,129(2002)
|
| [2] | 2j.k.luo,a.j.flewitt,s.m.spearing,n.a.fleck,w.i.milne,normallyclosedmicrogrippersusingahighlystresseddiamond-likecarbonandnibimorphstructure,appliedphysicsletters,85,5748(2004)
|
| [3] | 3c.casiraghi,j.robertson,a.c.ferrari,diamond-likecarbonfordataandbeerstorage,materialstoday,10,1(2007)
|
| [4] | 4c.donnet,a.erdemir,tribologyofdiamond-likecarbonfilms:fundamentalsandapplications,publishedbyspringer(2008)p.13
|
| [5] | 5r.k.roy,k.r.lee,biomedicalapplicationsofdiamondlikecarboncoatings:areview,j.biomedicalmaterialsresearchb,83,72(2007)
|
| [6] | 6a.c.ferrari,s.e.rodil,j.robertson,w.i.milne,isstressnecessarytostabilizesp3bondingindiamond-likecarbon,diamondandrelatedmaterials,11,994(2002)
|
| [7] | 7s.xu,d.flynn,b.k.tay,s.prawer,k.w.nugent,s.r.p.silva,y.lifshitz,w.i.milne,mechanicalpropertiesandramanspectraoftetrahedralamorphouscarbonfilmswithhighsp3fractiondepositedusingafilteredcathodicarc,philos.mag.b,76,351(1997)
|
| [8] | 8c.casiraghi,a.c.ferrari,j.robertson,ramanspectroscopyofhydrogenatedamorphouscarbon,physicalreviewb,72,85(2005)
|
| [9] | 9c.a.davis,asimplemodelfortheformationofcompressivestressinthinfilmsbyionbombardment,thinsolidfilms,226,30(1993)
|
| [10] | 10r.hauert,anoverviewonthetribologicalbehaviorofdiamond-likecarbonintechnicalandmedicalapplications,tribologyinternational,37,991(2004)
|
Full-Text
|
|
Contact Us
service@oalib.com QQ:3279437679 
WhatsApp +8615387084133
|
|
