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OALib Journal期刊
ISSN: 2333-9721
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c面蓝宝石衬底上6h-sic薄膜的低压化学气相外延生长与表征
Keywords: 无机非金属材料,6h-sic薄膜,低压cvd,蓝宝石
Abstract:
？采用低压化学气相沉积方法在c面蓝宝石衬底上异质外延生长出高结晶质量和良好表面形貌的6h-sic薄膜,研究了c_3h_8气体流速对薄膜结晶质量的影响.随着c_3h_8气体流速的降低,薄膜的结晶质量先增加后降低,表明薄膜的生长在开始阶段受表面反应控制,而后受质量输运控制.所得到的结晶质量最好的6h-sic薄膜,其摇摆曲线半高宽为0.6°,已经达到单晶水平.没有使用aln过渡层,制备出结晶质量更好的sic薄膜,表明对于蓝宝石衬底上sic薄膜的生长,起决定性因素的是温度,过渡层不是影响sic薄膜结晶质量的主要因素.
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