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OALib Journal期刊
ISSN: 2333-9721
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脉冲偏压幅值对tin/tialn多层薄膜微观结构和性能的影响
Keywords: 材料表面与界面,tin/tialn多层薄膜,电弧离子镀,硬度,微观结构,摩擦性能
Abstract:
？采用电弧离子镀的方法,通过改变脉冲偏压幅值在m2高速钢表面制备了tin/tialn多层薄膜,研究了脉冲电压幅值tin/tialn多层薄膜微观结构和性能的变化。随着脉冲偏压幅值的增加,薄膜表面的大颗粒数目明显减少。edx结果表明,脉冲偏压幅值的增加还引起al/ti原子比的降低。tin/tialn多层薄膜主要以(111)晶面为择优取向生长,随着脉冲偏压幅值的增加,峰值强度逐渐增强,晶粒尺寸在8nm~14nm。制备的tin/tialn多层薄膜的硬度都超过36gpa,是m2高速钢基体硬度的3.9倍以上,膜基结合力均达到60n以上。摩擦磨损测试结果表明,tin/tialn多层薄膜具有良好的抗磨损性能。
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