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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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离子束辅助激光制备织构薄膜的计算机模拟
Keywords: 辅助离子束,织构,薄膜制备,计算机模拟
Abstract:
？在离子束辅助激光制备取向薄膜的物理机制基础上,利用计算机模拟了织构薄膜生长的物理过程.结果表明,织构薄膜的质量直接与不同取向晶粒被辅助粒子束溅射掉的几率相关,这在实验中表现为与辅助离子束入射方向、离子束能量、薄膜材料种类等因素有关.
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