OALib Journal期刊
ISSN: 2333-9721
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非晶含氟聚合物薄膜的热稳定性
Keywords: 旋涂,af薄膜,热稳定性
Abstract:
?以teflonaf1600为原料,用旋涂法制备了非晶含氟聚合物(af)薄膜.通过扫描电镜(sem)、傅立叶转换红外(ftir)光谱和x射线光电子(xps)光谱等手段对热退火前后的薄膜进行了表征.所得薄膜具有无针孔,较光滑和平整的表面,300℃退火后薄膜表面的均匀性进一步改善.af薄膜在300℃以下具有良好的热稳定性,在400℃退火后cf3吸收峰强度稍有降低.在400℃退火后,其所含的cf3键合构型显著降低,cf2、cf等其它构型没有明显的变化,由于cf3基团的分解有少量无定型碳生成.
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