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OALib Journal期刊
ISSN: 2333-9721
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液相外延法制备β-bbo薄膜
Abstract:
？采用液相外延法在掺sr2+的α-bbo(001)衬底上制备了β-bbo薄膜,研究了制备条件对薄膜质量的影响.结果表明:当生长温度为810℃时,转速为300r/min生长的外延膜具有较高的结晶质量,且随着生长时间的延长,外延膜的结晶质量有所提高.β-bbo薄膜呈c轴高度择优取向,薄膜的双晶摇摆曲线半峰宽值fwhm仅为676.6″,表明β-bbo薄膜较好的结晶质量;在不具备相位匹配的条件下,β-bbo外延膜也能够实现二次谐波输出.
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