OALib Journal期刊
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用丝网印刷法制备pt电极及其性能
Keywords: 金属材料,铂电极,丝网印刷
Abstract:
?采用单层和双层印刷法在氧化铝衬底上制备功能陶瓷厚膜用pt电极,研究了烧结温度、升温速率和电极厚度对pt电极层的表面形貌、表面覆盖率和表面粗糙度的影响,以揭示晶粒长大、气孔生长及致密化机制.结果表明,在单层印刷pt电极的烧结过程中,低温阶段残留的碳使不同温区pt的主导扩散机制不同.双层印刷pt电极中第一层在600℃下烧结后,印刷第二层再在1200℃下烧结具有最大表面覆盖率和最小平均粗糙度(其值约为0.82um),同时具有最好的导电性能(方阻为0.044ω/□).
References
[1] | 1l.d.madsen,l.weaver,examinationofbarrierlayersforleadzirconatetitanatethinfilms,j.electron.mater.,21(1),93(1992)
|
[2] | 4j.g.e.gardeniers,a.smith,c.cobianu,characterizationofsol-gelpztfilmsonptocoatedsubstrates,j.mi-cromech.microeng.,5(2),153(1995)
|
[3] | 7j.b.vechembre,g.r.fox,sinteringofscreen-printedplat-inumthickfilmsforelectrodeapplications,j.mater.res.,16(4),922(2001)
|
[4] | 8songzhitang,renwei,wuxiaoqing,zhangliangying,yaoxi,effectofannealingtemperaturesonphasesandmicrostructuresofptandpt/tibottomelec-trodesforferroelectricthinfilms,chinesejournalofma-terialsresearch,11(4),363(1997)(宋志棠,任巍,吴小清,张良莹,姚熹,热处理温度对铁电薄膜底电极pt和pt/ti物相与形貌的影响,材料研究学报,11(4),363(19971)
|
[5] | 9w.w.jung,s.k.choi,s.y.kweon,s.j.yeom,platinum(100)hillockgrowthinpt/tilectrodestackforsrbi_2ta_2o_9ferroelectricrandomaccessmemory,j.elec-troceram,13(1-3),55(2004)
|
[6] | 15y.s.yoon,s.h.kim,s.-j.lee,h.k.kim,m.-j.lee,fabri-cationandfrequencyresponseofdual-elementultrasonictransducerusingpzt-5athickfilm,sensoractuat.a,125(2),463(2006)
|
[7] | 16k.yao,x.he,y.xu,m.chen,screen-printedpiezoelec-tricceramicthickfilmswithsinteringadditivesintro-ducedthroughaliquid-phaseapproach,sensoractuat.a,118(2),342(2005)
|
[8] | 2j.collier,i.a.cornejo,m.j.haun,ferroelectricthick-filmsforpiezoelectricapplications,ferroelectrics,154(1-4),47(1994)
|
[9] | 3l.simon,s.ledren,p.gonnard,g.pierre,processingandcharacterizationofpbtio_3thickfilmsonaluminasub-strates,j.electroceram,8(3),215(2002)
|
[10] | 5f.h.huang,l.che-yu,ripeningofplatinumparticlesonaluminiumoxide,scriptametall.,7(12),1239(1973)
|
[11] | 6k.t.miller,f.f.lange,d.b.marshall,theinstabilityofpolycrystallinethinfilms:experimentandtheory,j.mater.res.,5(1),151(1990)
|
[12] | 10k.lucke,k.detert,aquantitativetheoryofgrainbound-arymotionandrecrystallizationinmetalsinthepresenceofimpurities,actametall.,5(11),628(1957)
|
[13] | 11r.e.hoffman,d.turnbull,latticeandgrainboundaryself-diffusioninsilver,j.appl.phys.,22(5),634(1951)
|
[14] | 12w.d.kingery,h.k.bowen,c.a.goodwin,phasebound-aries,phaseseparationandelectricalpropertiesofmetaloxidecrystallinesolutions,am.ceram.soc.bull.,52(8),632(1973)
|
[15] | 13m.mclean,e.d.hondros,astudyofgrain-boundarygroovingattheplatinum/aluminainterface,j.mater.sci.,6(1),19(1971)
|
[16] | 14w.e.mustain,h.kim,s.prakash,j.stark,t.osborn,p.a.kohl,platinum-glasscompositeelectrodeforfuelcellapplications,electrochemicalandsolid-stateletters,10(12),210(2007)
|
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