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用电泳沉积-电沉积联合法制备二氧化锆(ysz)薄膜

Keywords: 电泳,电沉积,钇稳定二氧化锆,薄膜

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Abstract:

?先用电泳法在掺锶锰酸镧(la0.8sr0.2mno3-lsm)基片沉积一层钇稳定二氧化锆(yttria-stabilizedzirconia--ysz)薄膜,在烧结后的电泳薄膜上进行若干次电沉积和烧结,以封堵薄膜中孔隙进行.上述联合法综合了电泳沉积薄膜附着力强,烧结时不龟裂的优点和电沉积薄膜的颗粒细,易烧结性的优点,较好地解决了电化学沉积膜难以烧结致密的问题.制备出的薄膜致密性高,厚度为8~14μm.

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