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ti-ta-o复合薄膜的制备及抗腐蚀性

Keywords: 离子束增强沉积,ti-ta-o薄膜,模拟体液

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Abstract:

?采用离子束增强沉积法在niti基体上合成了具有不同组分比的ti-ta-o薄膜.研究了组分比对薄膜的相结构、力学性能和抗模拟体液腐蚀性的影响.sem,afm和xrd分析表明,所有薄膜均由纳米粒子堆积而成,膜层连续光滑,纯ti-o膜为金红石结构,而ti-ta-o膜为非晶态.划痕实验、显微硬度分析和电化学测试研究表明,加入ta后,膜与基体间的结合强度、韧性和抗腐蚀性增强,显微硬度下降.ta含量为36%(原子分数)的膜使niti的抗蚀性显著提高.

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